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Challenges of MEMS device characterization in engineering development and final manufacturing

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6 Author(s)
Maudie, T. ; Div. of Sensor Products, Motorola Inc., Phoenix, AZ, USA ; Miller, T. ; Nielsen, R. ; Wallace, D.
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Testing of microelectromechanical systems (MEMS) devices is rapidly progressing to the point that high volume, cost effective, and accurate measurement systems are necessary. This area of automatic test is very challenging compared to a normal semiconductor portfolio. Besides the typical electrical and thermal stimulus, a MEMS measurement system requires control of the quantity, property, or condition to be measured. Information on MEMS related testing issue including input stimuli and output responses are presented. A definition for a MEMS characterization system is proposed. Additionally, future demands based on a expanding product portfolio are discussed

Published in:

AUTOTESTCON '98. IEEE Systems Readiness Technology Conference., 1998 IEEE

Date of Conference:

24-27 Aug 1998