Flexible Hall Sensorics for Flux-Based Control of Magnetic Levitation

A flexible bismuth-based Hall sensor is realized with a total thickness of only 80 μm including encapsulation. After wiring, the sensors have a maximum height of 280 μm and could be mounted onto curved surfaces with radii down to 5 mm without degradation of its performance. These flexible sensors allow one to measure time-varying magnetic fields and are applied to realize flux-based control strategies for magnetically suspended systems, which is demonstrated by means of a single-axis magnetic levitation setup.