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Integrated array of gas sensors

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5 Author(s)
Anisimkin, V.I. ; Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia ; Krystal, R.G. ; Medved, A.V. ; Verona, E.
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A new surface acoustic wave multi-channel sensor array suitable for pattern recognition purposes has been implemented and tested on an ST-cut quartz substrate using one single palladium sorbent film for all the channels. The different response of each channel towards the same gas components is provided by the dependence of the mechanical displacement components of the acoustic wave on the propagation direction

Published in:

Electronics Letters  (Volume:34 ,  Issue: 13 )