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Resonant tunneling displacement transducer

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4 Author(s)
Vatannia, S. ; Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA ; Schiano, J.L. ; Gidenblat, G. ; Ginsberg, M.D.

We propose a new type of a tunneling displacement transducer. An electron energy filter quantum mechanically coupled to a conventional tunneling gap results in an improved ruggedness by enabling at least an order of magnitude increase in gap separation. This is achieved simultaneously with an increased sensitivity as compared to a more conventional electron tunneling transducer. We also show how the new transducer can be used in a force rebalance accelerometer

Published in:

Electron Devices, IEEE Transactions on  (Volume:45 ,  Issue: 7 )