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How to model and simulate microgyroscope systems

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3 Author(s)
D. Teegarden ; Analogy Inc., Beaverton, OR, USA ; G. Lorenz ; R. Neuf

An accurate physical model of a micro-electromechanical system can save valuable design time and slash the number of foundry runs needed for characterization. Using a set of existing simulators and field solvers, the authors developed a method for modeling the mechanical and electrical properties of their microgyroscope

Published in:

IEEE Spectrum  (Volume:35 ,  Issue: 7 )