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Tunable microcavity based on III-V semiconductor micro-opto-electromechanical structures (MOEMS) with strong optical confinement

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8 Author(s)
P. Viktorovitch ; Ecole Centrale de Lyon, Ecully, France ; J. -L. Leclercq ; X. Letartre ; T. Benyattou
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The key performances of optical filters requested by optical communications for wavelength-division multiplexing (WDM) systems are: (i) a high wavelength selectivity, enabling the selection of neighboring channels 1.6 nm apart with a crosstalk ratio of 20 dB, (ii) a continuous wavelength tuning range of about 30 nm around 1.55 /spl mu/m, with no degradation of the selectivity. We demonstrate the design and the fabrication of a vertical micromachined InP-air gap based Fabry-Perot filter, continuously tunable via electrostatic micromechanical actuation of the cavity air gap, which meets the WDM system requirements.

Published in:

Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings

Date of Conference:

20-24 July 1998