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The integration of surface micromachined devices with optoelectronics: technology and applications

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6 Author(s)
Warren, M.E. ; Sandia Nat. Labs., Albuquerque, NM, USA ; Blum, O. ; Sullivan, C.T. ; Shul, R.J.
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We describe efforts in integrating MEMS and optoelectronic or photonic functions and the fabrication constraints on both system components. The MEMS technology used in this work are silicon surface-machined systems fabricated using the SUMMiT (Sandia ultraplanar multilevel MEMS technology) process developed at Sandia. This process includes chemical-mechanical polishing as an intermediate planarization step to allow the use of 4 or 5 levels of polysilicon.

Published in:

Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings

Date of Conference:

20-24 July 1998