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A new characterization method for accurate capacitor matching measurements using pseudo-floating gate test structures in submicron CMOS and BiCMOS technologies

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4 Author(s)
O. Roux dit Buisson ; SGS-Thomson Microelectron., Crolles, France ; G. Morin ; F. Paillardet ; E. Mazaleyrat

In deep submicron CMOS and BiCMOS technologies, antenna effects affect the floating gate charge of conventional floating gate test structures, dedicated to capacitor matching measurement. In this paper, a new pseudo-floating gate test structure is designed. After test structure and modeling presentation, the testing method and results are given for several capacitor layouts (poly-poly and metal-metal)

Published in:

Microelectronic Test Structures, 1998. ICMTS 1998., Proceedings of the 1998 International Conference on

Date of Conference:

23-26 Mar 1998