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A potential application of inverse source solver for high resolution near field scanning of microelectronic packages is studied in this paper. A fast inverse source solver based on the fast Fourier transform algorithm and conjugate gradient algorithm is developed with a half-space Green's function. This solver can be used in microelectronic applications to solve radiation related problems, including electromagnetic interference and signal integrity of printed circuit boards or integrated circuit packagings. Simulation results show a significant improvement in image resolution and adjacent sources detectability when the inverse source solver is applied. Because of the improvements, the inverse source solver reduces the sensitivity on scan height in the near field scan process when the same source image resolution is desired. Experiments on measured data also validate the effectiveness of this solver.