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Fabrication and characterization of glassy carbon membranes

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5 Author(s)
Koval, Yuri ; Department of Physics, Universität Erlangen-Nürnberg, Erwin-Rommel-Str.1, 91058 Erlangen, Germany ; Geworski, Andreas ; Gieb, Klaus ; Lazareva, Irina
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In this work, the authors focus on a method to fabricate arbitrary shaped free standing membranes with a thickness less than 20 nm, produced from different polymers with the help of low-energy ion irradiation. The authors analyze the thickness of the membranes and its dependence on the details of the irradiation process. In order to tune the properties of the suspended membranes, an additional ion irradiation step has been used. This step is applied to already suspended membranes and leads to several effects, such as heating, shape transformation, etc. These effects were analyzed for irradiation with Ar+ and He+ ions. The authors have found that He+ irradiation has a significant advantage over Ar+ irradiation providing strained, smooth, and homogeneous membranes. In order to measure the electrical properties of the suspended membranes, the authors invented a new method to contact the membranes. These low resistance contacts can be achieved as the authors describe in detail. The membranes electrical properties after He+ ion irradiation at different temperatures are presented. Finally, the authors analyze Raman spectra, and thermal and electrical conductivity of the highly conducting membranes. The authors conclude that after high temperature He+ ion irradiation the membranes consist of material similar in properties to the glassy carbon obtained by pyrolysis. However, this method does not require high temperature pyrolysis step, which makes integration with on-chip electronics more feasible.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:32 ,  Issue: 4 )