By Topic

Fabrication and Measurement of Sidewall Gratings Integrated in Hybrid As2S3 -Ti:LiNbO3 Optical Waveguides

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Xin Wang ; Dept. of Electr. & Comput. Eng., Texas A&M Univ., College Station, TX, USA ; Yifeng Zhou ; Madsen, C.K.

In this paper, we demonstrated the fabrication and measurement of sidewall gratings integrated in a hybrid type of optical waveguide: As2S3-Ti:LiNbO3. This hybrid waveguide is constructed by patterning arsenic tri-sulfide (As2S3) strips on the midline of titanium-diffused channel waveguide in lithium niobate (Ti:LiNbO3). Sidewall gratings are written on both sidewalls of As2S3 strips by electron beam lithography (EBL) with 3% PMMA resist and a dose 350 μC/cm 2 at 50-kV electrons. The measured reflectance bandwidth was between 2.4 and 6.7 nm. Coupling coefficients ranging from 2.5 to 8.9 mm-1 were obtained. A transmission peak with a 3-dB bandwidth of ~0.25 nm was observed in the rejection band of a 432 μm-long phase-shifted sidewall grating. Such sidewall gratings integrated in hybrid As2S3-Ti:LiNbO3 waveguide can be used for numerous integrated optical devices including optical filters, switches, modulators, lasers, sensors, and wavelength division multiplexing (WDM).

Published in:

Lightwave Technology, Journal of  (Volume:32 ,  Issue: 17 )