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Microwave Properties of MAPTMS Sol-Gel Films for High-Speed Electrooptic Devices

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6 Author(s)
Demir, V. ; Coll. of Opt. Sci., Univ. of Arizona, Tucson, AZ, USA ; Voorakaranam, R. ; Himmelhuber, R. ; Herrera, O.D.
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This paper measures the dielectric constant and loss tangent of methacryloyloxy-propyltrimethoxysilane (MAPTMS) sol-gel films over a wide range of microwave frequencies. Samples were prepared by spin-coating sol-gel films onto metallized borosilicate glass substrates. The dielectric properties of the sol-gel were probed up to 50 GHz with several different sets of coplanar waveguide transmission lines electroplated onto sol-gel films. The dielectric constant and loss tangent are determined to be approximately 3.1 and 3×10-3 at 35 GHz, respectively. This demonstration shows that MAPTMS sol-gel is a viable material for integration with high-speed electrical and electrooptic devices.

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:62 ,  Issue: 8 )