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Remote instrument diagnosis on the Internet

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3 Author(s)

First AID (Automated Instrument Diagnostics) is a fault-diagnosis expert system that is based on an information client architecture. This expert system uses generic tools such as Web browsers to aid service engineers in remotely diagnosing the faults in LEO scanning electron microscopes (SEMs). The system lets engineers acquire information directly from the SEM, diagnose inaccurate behavior and remedy inappropriate instrument settings

Published in:

Intelligent Systems and their Applications, IEEE  (Volume:13 ,  Issue: 3 )