Cart (Loading....) | Create Account
Close category search window

A Highly Reliable 2-Bits/Cell Split-Gate Flash Memory Cell With a New Program-Disturbs Immune Array Configuration

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Liang Fang ; Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China ; Jing Gu ; Bo Zhang ; Wei-Ran Kong
more authors

A highly reliable 2-bits/cell split-gate flash memory cell in a novel program-disturbs immune array architecture is fabricated and demonstrated. Using a novel metal interconnect technique, a new virtual-ground array architecture is realized to greatly improve program disturbs as compared with conventional and-type configuration. A fully self-aligned process with shallow trench isolation in cell array is also proposed for the first time to fabricate this word-line shared split-gate structure without any lithomisalignment issue. Moreover, the negative charge trap in select gate (SG) oxide during conventional poly-to-poly Fowler-Nordheim tunneling erase operation is found as an important contribution to the cycling degradation for cells with thin SG oxide, and a negative control gate bias erase scheme is then presented to enhance the endurance reliability in this paper. A 250-°C baking experiment (before and after cycling) is performed to explore this cell's data retention characteristics, proving the free of extrinsic and intrinsic defect. Erase and program characteristics are comparable with conventional split-gate cell as well.

Published in:

Electron Devices, IEEE Transactions on  (Volume:61 ,  Issue: 7 )

Date of Publication:

July 2014

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.