By Topic

High Performance of Fin-Shaped Tunnel Field-Effect Transistor SONOS Nonvolatile Memory With All Programming Mechanisms in Single Device

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Yi-Ruei Jhan ; Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Yung-Chun Wu ; Hsin-Yi Lin ; Min-Feng Hung
more authors

This paper demonstrates a silicon-oxide-nitrideoxide-silicon (SONOS) nonvolatile memory (NVM) with fin-shaped polycrystalline silicon channel tunnel field-effect transistor (TFET). It differs from other memory devices in that its programming mechanisms include Fowler-Nordheim (FN) tunneling, channel hot-electron (CHE) injection, and band-toband tunneling-induced hot electron (BBHE) in single memory cell. In FN programming, both the ON-state current and the program/erase (P/E) operations are based on quantum tunneling. For FN tunneling, when a VG of 17 V is applied for only 1 ms, this device has a large threshold voltage shift (ΔVTH) of 4.7 V. The fin-shaped TFET SONOS (T-SONOS) NVM exhibits superior endurance of 88% after 104 P/E cycles. The memory window remains 65% of its original value after 10 years at a high temperature of 85 °C. On the other hand, the device exhibits better endurance of 74% for CHE programming and BBHE programming after 104 P/E cycles. The memory window retains 81% in CHE programming and 65% in BBHE programming after 10 years. The fin-shaped T-SONOS NVM exhibits high performance that can be achieved in polycrystalline silicon NVM.

Published in:

Electron Devices, IEEE Transactions on  (Volume:61 ,  Issue: 7 )