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Synthesis of fault-tolerant supervisor for automated manufacturing systems: a case study on photolithographic process

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2 Author(s)
Kwang-Hyun Cho ; Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea ; Jong-Tae Lim

A discrete event dynamic system (DEDS) approach is utilized to improve the reliability of a system from the fault-tolerance viewpoint. We propose a systematic way to classify faults and failures quantitatively and to find tolerable fault event sequences embedded in DEDSs. After this, the synthesis of a fault-tolerant supervisory control system is investigated. A case study of a photolithographic process in a semiconductor manufacturing system is provided to illustrate these techniques

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Robotics and Automation, IEEE Transactions on  (Volume:14 ,  Issue: 2 )