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Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control

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4 Author(s)
V. D. Samper ; Inst. of Micro-Electron., Singapore ; A. J. Sangster ; R. L. Reuben ; U. Wallrabe

A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithographie, Galvanoformung, Abformung (LIGA) technique. The finite-element method is used to predict the available output torque, and the potential for extracting the useful output from the device is assessed

Published in:

Journal of Microelectromechanical Systems  (Volume:7 ,  Issue: 2 )