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Latch-up characterization in standard and twin-tub test structures by electrical measurements, 2-D simulations and IR microscopy

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6 Author(s)

The influence of different layout parameters on latchup susceptibility was studied on standard four-stripes test structures fabricated using two bulk processes: standard n-well and a twin-tub technology. Twin-tub structures show increased latchup hardness and guard-ring effectiveness, mainly due to the increased doping level and the consequent decrease in substrate and well resistances. Standard and twin-tub structures show marked three-dimensional effects in the holding characteristics, which lead to an uneven distribution of the latchup current within test structures and hysteresis in the I-V characteristics.<>

Published in:

Microelectronic Test Structures, 1990. ICMTS 1990. Proceedings of the 1990 International Conference on

Date of Conference:

5-7 March 1990