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Investigation of Electrostatic Integrity of Nanoscale Dual Material Gate Dielectric Pocket Silicon-on-Void (DMGDPSOV) MOSFET for Improved Device Scalability

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4 Author(s)
Kumari, V. ; Dept. of Electron. Sci., Univ. of Delhi, New Delhi, India ; Saxena, M. ; Gupta, R.S. ; Gupta, M.

This paper presents a 2-D temperature-dependent analytical drain current model, which is valid for six different device architectures (by slightly modifying the used parameters), i.e., dual material gate dielectric pocket silicon-on-void, dual material gate silicon-on-void, dual material gate silicon-on-insulator, dielectric pocket silicon-on-void, silicon-on-void, and silicon-on-insulator MOSFETs. The results thus obtained, i.e., drain current, transconductance, gm/Ids ratio, threshold voltage, subthreshold slope, and Ion/Ioff ratio have been verified with the simulated results obtained using ATLAS 3-D device simulator for channel length down to 30 nm. The analytical model is also used to investigate the impact of temperature variation on the characteristics of N-MOS inverter based on different architectures. In addition, impact of process and parameters variation (i.e., variation in shallow extension depth (Xe), side pillar thickness (Tst), thickness of buried oxide layer (t3) along with the variation in temperature) on the subthreshold performance of different devices has also been studied through exhaustive device simulation.

Published in:

Nanotechnology, IEEE Transactions on  (Volume:13 ,  Issue: 4 )