Referenced Items are not available for this document.
The current state of novel technology, surface microfabricated ultrasonic transducers, is reported. Experiments demonstrating both air and water transmission are presented. Air-coupled longitudinal wave transmission through aluminum is demonstrated, implying a 110 dB dynamic range for transducers at 2.3 MHz in air. Water transmission experiments from 1 to 20 MHz are performed, with a measured 60 dB SNR at 3 MHz. A theoretical model is proposed that agrees well with observed transducer behavior. Most significantly, the model is used to demonstrate that microfabricated ultrasonic transducers constitute an attractive alternative to piezoelectric transducers in many applications.
Published in:
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on
(Volume:45
,
Issue:
3
)
Date of Publication: May 1998
- Page(s):
- 678 - 690
- ISSN :
- 0885-3010
- INSPEC Accession Number:
- 5950192
- Digital Object Identifier :
- 10.1109/58.677612
- Date of Current Version :
- 06 August 2002
- Issue Date :
- May 1998
- Sponsored by :
- IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society
- PubMed ID :
- 18244219
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