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Fabrication of Humidity Sensor Based on Bilayer Graphene

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3 Author(s)
Meng-Chu Chen ; Dept. of Appl. Sci., Nat. Taitung Univ., Taitung, Taiwan ; Cheng-Liang Hsu ; Ting-Jen Hsueh

Bilayer graphene was synthesized by chemical vapor deposition, for which the optical transmission is ~95%-96%. XPS detected that a few oxygen molecules were absorbed on the surface of graphene. The Raman and optical transmission spectra verified that the graphene sample is bilayer. The responses of the bilayer graphene sample increased with increased relative humidity.

Published in:

IEEE Electron Device Letters  (Volume:35 ,  Issue: 5 )