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Stable pull-in electrodes for narrow gap actuation

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9 Author(s)
Ng, E.J. ; Stanford Univ., Stanford, CA, USA ; Yushi Yang ; Hong, V.A. ; Ahn, C.H.
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This paper reports the use of movable electrodes that can be electrostatically pulled in to achieve narrow gaps beyond lithography / etch capabilities. Width-extensional resonators with frequencies of 50 MHz and quality factors of 150k are demonstrated with such movable electrodes to have a significantly lower motional impedances when pullin occurs. Sub-ppm stability over 105 pull-in/pull-out cycles is measured using temperature-compensated resonators within the epi-seal epitaxial polysilicon encapsulation process. The pull-in phenomena is reversible, but can be made permanent by electrically welding the pulled-in electrode to a stop.

Published in:

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Date of Conference:

26-30 Jan. 2014

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