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Browse Journals & Magazines > Science, Measurement and Tech ...> Volume:145 Issue:2 Help

Optimisation of empirical model for IC fabrication process using linear programming

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4 Author(s)
Sprevak, D. ; Dept. of Stat. & Oper. Res., Queen''s Univ., Belfast, UK ; Ferguson, R.S. ; Walton, A.J. ; Newsam, M.I.

A procedure for selecting alternative sets of optimal parameters for an NMOS semiconductor device manufacturing process is presented. An optimisation strategy is discussed which leads to the calculation of process parameters for devices that attain the designed characteristics while having the process parameters set at their most desirable values

Published in:
Science, Measurement and Technology, IEE Proceedings -  (Volume:145 ,  Issue: 2 )

Date of Publication: Mar 1998

Page(s):
58 - 60
ISSN :
1350-2344
INSPEC Accession Number:
5890343
Digital Object Identifier :
10.1049/ip-smt:19981810
Product Type:
Journals & Magazines
Date of Current Version :
06 August 2002
Issue Date :
Mar 1998
Sponsored by :
IET

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