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Optimisation of empirical model for IC fabrication process using linear programming

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4 Author(s)
D. Sprevak ; Dept. of Stat. & Oper. Res., Queen's Univ., Belfast, UK ; R. S. Ferguson ; A. J. Walton ; M. I. Newsam

A procedure for selecting alternative sets of optimal parameters for an NMOS semiconductor device manufacturing process is presented. An optimisation strategy is discussed which leads to the calculation of process parameters for devices that attain the designed characteristics while having the process parameters set at their most desirable values

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IEE Proceedings - Science, Measurement and Technology  (Volume:145 ,  Issue: 2 )