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Geneating Solid Models for VLSI Process and Device Simulation

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4 Author(s)
P. Lamb ; CSIRO Division of Information Technology, Centre for Spatial Information Systems ; C. Hegarty ; N. Hitschfeld ; W. Fichtner

First Page of the Article

Published in:

Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on

Date of Conference:

31 May-1 Jun 1992