By Topic

Suspended optical waveguide with in-plane degree of freedom for microelectromechanical applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Haronian, D. ; Fac. of Eng., Tel Aviv Univ., Israel

A suspended optical waveguide displacement sensor (SOWDS) based on single crystal silicon beams with an inherent in-plane degree of freedom is presented. The SOWDS technology is based on the single crystal silicon reactive ion etching and metallisation (SCREAM) process, and opens new methods of monolithically integrating optical manipulation with SCREAM based sensors and actuators

Published in:

Electronics Letters  (Volume:34 ,  Issue: 7 )