Referenced Items are not available for this document.
A novel electro-optical sensing method for measuring the displacements of a micromachined accelerometer proof mass is described. By using on-chip integrated photodiodes, and by modulating the illumination, accelerations at very low frequencies are detected. A 10 μg/√Hz noise equivalent acceleration (NEA) is predicted. Characterisation of the CMOS read-out circuits and on-chip integrated sensing photodiodes is presented. Preliminary measurements on a prototype device are reported
Published in:
Electronics Letters
(Volume:34
,
Issue:
7
)
Date of Publication: 2 Apr 1998
- Page(s):
- 654 - 655
- ISSN :
- 0013-5194
- INSPEC Accession Number:
- 5896283
- Digital Object Identifier :
- 10.1049/el:19980484
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- 2 Apr 1998
- Sponsored by :
- Institution of Engineering and Technology
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