By Topic

Effects of Ambient Humidity on a Micromachined Silicon Thermal Wind Sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Bei Chen ; Key Lab. of MEMS, Southeast Univ., Nanjing, China ; Yan-qing Zhu ; Ming Qin ; Qing-An Huang

The effect of ambient humidity on a micromachined silicon 2-D thermal wind sensor has been investigated. The sensor includes a central heater and four temperature sensors. It measures the flow-induced temperature gradient on the heated surface. Properties of the ambient air, such as density, viscosity, heat conductivity, and specific heat capacity, are theoretically presented to explore their effects on the performance of the sensor at different relative humidity levels. The output of the sensor as a function of wind speed at different relative humidity levels has been measured. It shows that there is a measurable effect at both high relative humidity and temperature. The results presented here provide a valuable reference for the practical applications of the wind sensor.

Published in:

Microelectromechanical Systems, Journal of  (Volume:23 ,  Issue: 2 )