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Maintenance scheduling and staffing policies in a wafer fabrication facility

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3 Author(s)
Mosley, S.A. ; Intel Corp., DuPont, WA, USA ; Teyner, T. ; Uzsoy, R.M.

We examine how to reduce the adverse effects of machine down time by prioritizing production equipment for attention by a limited number of maintenance personnel. The maintenance scheduling policies use system information to determine which machines are the most critical at a given time. This information includes repair times, queue lengths, due dates, available capacity, and steady-state utilizations. The effects of different staffing levels are also considered. A discrete-event simulation model of a wafer fabrication facility is used to examine the performance of the different policies. Results indicate that the choice of maintenance scheduling policy can significantly affect system performance under restrictive staffing-levels. Moreover, factory performance is shown to be sensitive to small changes in staffing level

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:11 ,  Issue: 2 )