By Topic

An adaptive run-to-run optimizing controller for linear and nonlinear semiconductor processes

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Del Castillo, E. ; Dept. of Ind. Eng., Texas Univ., Arlington, TX, USA ; Jinn-Yi Yeh

This paper presents a new run-to-run (R2R) multiple-input-multiple-output controller for semiconductor manufacturing processes. The controller, termed optimizing adaptive quality controller (OAQC), can act both as an optimizer-in case equipment models are not available-or as a controller for given models. The main components of the OAQC are shown and a study of its performance is presented. The controller allows one to specify input and output constraints and weights, and input resolutions. A multivariate control chart can be applied either as a deadband on the controller or simply to provide out of control alarms. Experimental designs can be utilized for on-line (recursive) model identification in the optimization phase. For testing purposes, two chemical mechanical planarization processes were simulated based on real equipment models. It is shown that the OAQC allows one to keep adequate control even if the input-output transfer function is severely nonlinear. Software implementation including the integration of the OAQC with the University of Michigan's Generic Cell Controller (GCC) is briefly discussed

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:11 ,  Issue: 2 )