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Effects of nonlocal electron kinetics and transition from α to γ regime in an RF capacitive discharge in nitrogen

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4 Author(s)
Tatarova, E. ; Centro de Fisica de Plasmas, Inst. Superior Tecnico, Lisbon, Portugal ; Stoykova, E. ; Bachev, K. ; Zhelyazkov, Ivan

The electron kinetics and regime of operation of asymmetrically coupled RF (27-MHz) nitrogen discharges in two vessels with different interelectrode gaps over the range of 0.20-0.35 torr gas pressure are studied in terms of the electron energy distribution function (EEDF). The latter is measured by means of a computer-controlled data acquisition system, a Langmuir probe with cross-modulation second derivative technique applied. The experiments are performed with an axial resolution along the RF electric field and accompanied with a measurement of electrical discharge characteristics. The effects of local and nonlocal plasma response are considered. The transition between α and γ discharge regimes is registered by measuring the EEDF and its moments' changes with the increase of the RF discharge current density

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Plasma Science, IEEE Transactions on  (Volume:26 ,  Issue: 2 )