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Low-power compact 2×2 thermooptic silica-on-silicon waveguide switch with fast response

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3 Author(s)
Q. Lai ; Inst. for Quantum Electron., Fed. Inst. of Technol., Zurich, Switzerland ; W. Hunziker ; H. Melchior

5-mm-long and 50-μm-wide thermooptic waveguide 2×2 Mach-Zehnder interferometer (MZI) switches with multimode interference (MMI) couplers have been realized in silica-on-silicon. The use of diffused square waveguides with a separating trench results in low heating power of 110 mW for /spl pi/ phase shift and short rise and fall times of 150 and 180 μs, respectively.

Published in:

IEEE Photonics Technology Letters  (Volume:10 ,  Issue: 5 )