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Monolithic wavelength-graded VCSEL and resonance-enhanced photodetector arrays for parallel optical interconnects

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8 Author(s)
Luong, S.Q. ; Center for High Technol. Mater., New Mexico Univ., Albuquerque, NM, USA ; Ortiz, G.G. ; Zhou, Y. ; Jun Lu
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Monolithic arrays of wavelength-graded vertical-cavity surface-emitting lasers (VCSELs) and resonance-enhanced photodetectors (PDs) have been realized with the same epilayer structure using the topography-controlled enhancement and reduction of the metal-organic chemical vapor deposition (MOCVD) growth rate on a patterned substrate. The repeatability of this technique was demonstrated by using different VCSEL and resonance-enhanced photodetector (REPD) arrays from the same wafer.

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Photonics Technology Letters, IEEE  (Volume:10 ,  Issue: 5 )