Monolithic wavelength-graded VCSEL and resonance-enhanced photodetector arrays for parallel optical interconnects

Monolithic arrays of wavelength-graded vertical-cavity surface-emitting lasers (VCSELs) and resonance-enhanced photodetectors (PDs) have been realized with the same epilayer structure using the topography-controlled enhancement and reduction of the metal-organic chemical vapor deposition (MOCVD) growth rate on a patterned substrate. The repeatability of this technique was demonstrated by using different VCSEL and resonance-enhanced photodetector (REPD) arrays from the same wafer.