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Coplanar passive elements on Si substrate for frequencies up to 110 GHz

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5 Author(s)
Heinrich, W. ; Ferdinand-Braun-Inst. fur Hochstfrequenztech., Berlin, Germany ; Gerdes, J. ; Schmiickle, F.J. ; Rheinfelder, C.
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This paper provides both modeling and design information on coplanar passive elements on a silicon substrate. The influence of substrate resistivity on coplanar waveguide (CPW) loss is discussed, and elements of a cell library for coplanar monolithic microwave integrated circuits (MMIC's) on high-resistivity substrates are presented. The elements include discontinuities, junctions, and spiral inductors. The models are based on field-theoretical simulations and verified by S-parameter measurements up to 110 GHz

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:46 ,  Issue: 5 )