Scheduled System Maintenance:
On May 6th, single article purchases and IEEE account management will be unavailable from 8:00 AM - 5:00 PM ET (12:00 - 21:00 UTC). We apologize for the inconvenience.
By Topic

Super-Resolving IC Images With an Edge-Preserving Bayesian Framework

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Zhengrong Wang ; State Key Lab. of Digital Manuf. Equip. & Technol., Huazhong Univ. of Sci. & Technol., Wuhan, China ; Hua Yang ; Wenlong Li ; Zhouping Yin

Imaging system is one of important components in integrated circuit (IC) packaging, such as flip chip and wafer level packaging. The limit of resolution in the imaging system and the defocus blur by the sensitivity of depth of field, increasingly are the new stumbling block in the pace of package technique keeping up with IC fabrication. The goal of this work is to introduce the potential of image super-resolution (SR) technique in conquering the aforementioned challenges, and facilitates detecting position mark, defect identification and other corresponding post-process applications. An edge-preserving super-resolution Bayesian framework based on total variation regularization is employed. An accurate and efficient motion estimation method is first used to assure the success of SR technique. Mathematically, the convexity of cost function guaranteeing the global optimal solution is demonstrated, and then, the steepest gradient descent for optimizing cost function is reasonably obtained. Eventually, the simulated and real experiments figure out the encouraging performance of the proposed framework that increases certainly the resolution, to the great extent eliminates the defocus blur, and could be considerable robust against the variation of blur and noise level. It is believed that the SR technique for image data processing in the IC package should open a new perspective of coping with technology challenge.

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:27 ,  Issue: 1 )