Cart (Loading....) | Create Account
Close category search window
 

Analytical Models for Three-Dimensional Ion Implantation Profiles in FinFETs

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Liping Wang ; Sch. of Eng., Univ. of Glasgow, Glasgow, UK ; Brown, A.R. ; Cheng, B. ; Asenov, A.

A set of analytical models based on the Pearson distribution function applied to the modeling of ion implantations in the 3-D structure of FinFETs is presented. The method provides a succinct way to simulate the doping profiles in FinFETs at low computational cost. Compared to previous analytical methods based on Gaussian distributions, this approach handles more realistic asymmetrical doping distributions arising from ion implantation. A simulation module in C++ has been developed to model ion implantations in FinFETs based on this analytical approach. The simulation module is demonstrated in an example simulation of a silicon-on-insulator FinFET with physical gate length of 20 nm.

Published in:

Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on  (Volume:32 ,  Issue: 12 )

Date of Publication:

Dec. 2013

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.