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Single Chip Dual Plate Capacitive Proximity Sensor With High Noise Immunity

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5 Author(s)
Yong Sin Kim ; Sch. of Electr. & Electron. Eng., Chung-Ang Univ., Seoul, South Korea ; Soon-Ik Cho ; Dong Ho Shin ; Jingu Lee
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This letter presents a dual plate capacitive proximity sensor (PS) that is integrated into a single chip with high environmental noise immunity. To efficiently reject environmental noise, the proposed PS employs two noise rejection techniques: 1) the use of a switched-charge amplifier and 2) synchronous sampling/filtering technique. The proposed PS is fabricated using a standard CMOS 0.5- μm process, and it occupies an area of 0.7 mm × 0.3 mm. Experimental results show that the proposed PS can detect an object up to 8 cm away from the sensor at an average current of 370 μA with a resolution of 1% output frequency.

Published in:

Sensors Journal, IEEE  (Volume:14 ,  Issue: 2 )