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Real time dispatch gets real time results

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2 Author(s)
Appleton-Day, K. ; Adv. Micro Devices Inc., Austin, TX, USA ; Liming Shao

Since the on-line dispatch system is the primary method of prioritizing and directing the flow of work through a paperless fab, it makes sense that we place high demands on a dispatching tool. The demands were met by ASI's RTD system. The flexibility and customizability that RTD offers allows us to execute dispatch logic using real-time factory systems data. We can apply unique rules to accommodate unique tool requirements. With constantly evolving computer technology, we believe dispatching holds promising implications for the continuous improvement of wafer fabrication performance

Published in:

Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on

Date of Conference:

6-8 Oct 1997