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300 mm fab design-a total factory perspective

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1 Author(s)
Plata, J.J. ; Texas Instrum. Inc., Dallas, TX, USA

This paper identifies 300 mm issues that affect the design of the factory from the individual machine to the overall concept, and assess which factors have the greatest potential impact on the physical factory. The discrimination between the facility and the manufacturing equipment blurs: the melding of the equipment and the facility progresses to the point wherein the design of the facility is synergetic with the equipment and the wafer handling scheme. This suggests a scenario wherein the entire physical factory is considered as an integral part of the manufacturing “machine”. This paper details many of the potential issues and outlines the elements of an advanced production factory

Published in:

Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on

Date of Conference:

6-8 Oct 1997