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Crystalline IGZO thin films were first used in consumer products successfully by a joint development with Sharp Corporation. The crystalline IGZO thin films have a CAAC (C-axis Aligned Crystal) structure, a novel crystalline structure without clear grain boundaries. We examined the mechanism of formation of the structure on a given surface and fabricated TFTs using CAAC-IGZO. We examined their characteristics and found that the TFTs had little variation in characteristic and high reliability even with a short channel length L. Application of CAAC-IGZO to various LSIs is expected.