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Multi-channel chemical sensor using surface acoustic wave device

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3 Author(s)
Nomura, T. ; Shibaura Inst. of Technol., Tokyo, Japan ; Saitoh, A. ; Furukawa, S.

Multi-channel SAW chemical sensor is used as an analytical system for organic gas detection. SAW sensors show a high frequency property, and can become multi-channel devices on a substrate. The features improve sensor sensitivity and enable integration of the sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of each channel was used to make a response pattern. The response to odorant solvents showed different analyte specific patterns

Published in:

Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE  (Volume:1 )

Date of Conference:

5-8 Oct 1997