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SAW characteristics of diamond-like carbon thin films on various piezoelectric substrates

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5 Author(s)
Kim, Jin Yong ; Sch. of Mater. Sci. & Eng., Seoul Nat. Univ., South Korea ; Joon Kim, Hyeong ; Cho, Hyun Min ; Yang, Hyung Kook
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We studied SAW characteristics of DLC thin films sputter deposited on various substrates, such as Si, quartz, and LiTaO3. The film properties as well as SAW characteristics showed quite a large dependence on the kind of substrates on which the film was deposited. To examine their SAW properties, 1-port SAW resonators and 2IDT-type SAW filters were fabricated. The ZnO/IDT/DLC/Si(100) multilayer structure showed the 1st mode SAW velocity at kHDLC=0.262 and kHZnO=0.837 was 5614 m/sec. On the contrary, DLC films on quartz and LiTaO3 were observed to decrease SAW velocity. This contradictory result might be due to different properties of the DLC film according to the substrate on which it was deposited

Published in:

Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE  (Volume:1 )

Date of Conference:

5-8 Oct 1997