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Fabrication of vanadium oxide microbolometers on thin polyimide films

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2 Author(s)
De Bruyker, D. ; Palo Alto Res. Center (PARC), Palo Alto, CA, USA ; XU, B.

We report the fabrication and characterization of thin film vanadium oxide microbolometer detector elements on thin (12.5 um) polyimide films. The microbolometer detectors have been designed and are being evaluated for use in scanning radiometers aboard a satellite. Preliminary characterization results (nominal resistance, temperature coefficient, thermistor noise) are reported.

Published in:

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Date of Conference:

16-20 June 2013