By Topic

Fabrication of vanadium oxide microbolometers on thin polyimide films

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
D. De Bruyker ; Palo Alto Research Center (PARC), Palo Alto, CA, USA ; B. Xu

We report the fabrication and characterization of thin film vanadium oxide microbolometer detector elements on thin (12.5 um) polyimide films. The microbolometer detectors have been designed and are being evaluated for use in scanning radiometers aboard a satellite. Preliminary characterization results (nominal resistance, temperature coefficient, thermistor noise) are reported.

Published in:

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

Date of Conference:

16-20 June 2013