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A novel cubic X-ray detector diode with isotropic response for high-energy radiation dosimetry

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6 Author(s)
Norlin, P. ; Acreo Swedish ICT AB, Stockholm, Sweden ; Oberg, O. ; Junique, S. ; Kaplan, W.
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A novel X-ray detector diode, optimized for angular independent (isotropic) dose response, is presented. The diode is designed as a silicon cube with pn-junctions on all six sides, which creates a close to 3D symmetrical device. The cube edge is 300 μm or 410 μm. It is manufactured by a micromachining based process featuring deep reactive ion etching of silicon-on-insulator substrates, doping of vertical walls from gas phase and refill of etched trenches with polysilicon. For 6 MV X-rays, in the ±30° beam angle range, the variation in detector response was at best ±0.5% for a cubic diode compared to ±3.3% for conventional diodes, a factor 7 improvement.

Published in:

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Date of Conference:

16-20 June 2013