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A micromachined integrated gyroscope and accelerometer based on gas thermal expansion

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5 Author(s)
Song Lin Cai ; Inst. of Instrum. Sci. & Technol., Tsinghua Univ., Beijing, China ; Rong Zhu ; Heng Gao Ding ; Yong Jun Yang
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This paper reports a novel micromachined integrated gyroscope and accelerometer based on gas thermal expansion. Using gas movement induced by alternating heat expansion in a micro chamber instead of a solid proof mass movement, a new type of micro gyroscope with a wide-range rotation detectability incorporating with 1-axis acceleration sensing is accomplished. Experiments demonstrate a good linearity of the rotation output in response to the angular rate from -3000 °/s to +3000 °/s and the acceleration output in response to the acceleration in the range of ±1g, which validate the simultaneous measurements of 1-axis angular rate and 1-axis acceleration in one chip. Meanwhile, the coupling effects among 3-axis rotations and accelerations are investigated experimentally to demonstrate low coupling effect via using thermal expansion flow.

Published in:

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Date of Conference:

16-20 June 2013