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Integrated sensor cross-sensitivity analysis

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4 Author(s)
Roozeboom, C.L. ; Stanford Univ., Stanford, CA, USA ; Salgado, J.F. ; Hopcroft, M.A. ; Pruitt, B.L.

We present data and analysis of sensor cross-sensitivities to a range of environmental conditions: temperature, humidity, light intensity, air flow, magnetic field, and acceleration. We used previously developed multifunctional integrated sensors (MFISes) with ten functions on a single chip as the test platform. We quantify the effect of test conditions on sensor offset and sensitivity, examine the fundamental mechanisms of the cross-sensitivities, and compare the performance of different transduction principles. The data and analysis is key to enabling the use of multifunctional sensors and is applicable to general sensor design and operation.

Published in:

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Date of Conference:

16-20 June 2013