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Pulsed Hertzian dipole radiation and electrostatic discharge events in manufacturing

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1 Author(s)
Maloney, T.J. ; Intel Corp., Santa Clara, CA, USA

A destructive Charged Device Model electrostatic discharge event can happen in semiconductor manufacturing and should be detectable from radiation that results from collapse of an electric dipole. The analytically describable radiation field pulse of CDM can be readily produced with a new instrument that creates dipole collapse at will. A coaxial monopole E-field antenna's transfer function gives the antenna signal in near-field, and experiments compare well with theory. A major feature of the antenna response to this field pulse is a bipolar "monocycle" pulse. A transmission linebased synthetic monocycle pulser, for characterizing antenna-driven ESD detectors, can be built and is described.

Published in:

Electromagnetic Compatibility Magazine, IEEE  (Volume:2 ,  Issue: 3 )

Date of Publication:

3rd Quarter 2013

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