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Microelectromechanical vibration sensor with optical interconnects

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5 Author(s)
Peiner, E. ; Inst. fur Halbleitertech., Tech. Univ. Carolo-Wilhelmina, Braunschweig, Germany ; Scholz, D. ; Fricke, K. ; Schlachetzki, Andreas
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A resonant vibration sensor realized using silicon micromachining for wear monitoring of rotating machinery is described. It comprises a mechanical resonator, piezoresistive bridge, and components for fiber-optical signal readout by an infrared light-emitting diode. The performance of the microsystem is demonstrated by its static and dynamical behavior. The results confirm that the described sensor has the potential for on-line vibration control of rotating machinery operated under the conditions of industrial production

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Microelectromechanical Systems, Journal of  (Volume:7 ,  Issue: 1 )