By Topic

Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Kiang, Meng‐Hsiung ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; Solgaard, O. ; Lau, Kam Y. ; Muller, R.S.

We describe the design and fabrication of surface-micromachined resonant microscanners that have large scan angles and fast scan speeds. These scanning micromirrors, which are hundreds of micrometers on a side, are driven by electrostatic-comb actuators and have resonant frequencies in the kilohertz range. Fabricated with two or three structural layers of polysilicon, the scanners are compact, extremely light in weight, and potentially very low in cost. Their power consumption is also minimal because the capacitive motors draw very low currents. High-precision positioning (0.01° dynamically and 0.038° statically) over a large angular range (up to 28° optical angle) makes the micromirrors suitable for a variety of optical applications such as laser scanners and printers, displays, holographic data storage, and fiber-optic switches. We have demonstrated microscanners of this type in bar-code readers, which are important devices with a growing number of applications in many industries

Published in:

Microelectromechanical Systems, Journal of  (Volume:7 ,  Issue: 1 )