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On Improving the Predictability of Cycle Time in an NVM Fab by Correct Segmentation of the Process

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1 Author(s)
Hassoun, M. ; Ind. Eng. Dept., Ariel Univ., Ariel, Israel

Based on a simulated fab, we first show that forecasting the steady state cycle time of process segments is possible based on certain segment characteristics. We then show that the cycle time predictability is highly dependent on the choice of the segmentation, with the more efficient segmentation corresponding to the product layers.

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:26 ,  Issue: 4 )

Date of Publication:

Nov. 2013

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