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Sensing properties of the anisimkin Jr. acoustic modes in uncoated ST-quartz plates

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1 Author(s)
Anisimkin, V. ; Kotel'nikov Inst. of Radioeng. & Electron., Moscow, Russia

The Anisimkin Jr. (AN) acoustic plate modes having quasi-longitudinal (QL), quasi-shear-vertical (QSV) and quasi-shear-horizontal (QSH) polarizations are studied experimentally in uncoated ST,X-quartz plates with normalized plate thicknesses h/λ = 1.485 and 1.67 (where h is thickness and λ is wavelength). The sensitivities of the modes toward mass loading (water vapor) are measured at different temperatures in the range 10.6°C to 23°C and compared with that of the Rayleigh SAW. The sensitivity of the same modes toward temperature is measured from 15°C to 85°C and compared with those of the bulk waves propagating in the same direction. Acoustic plate modes with dominant responses toward humidity or temperature are found.

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:60 ,  Issue: 10 )